普達特科技(00650.HK):OCTOPUS平台半導體濕法清洗設備發貨
格隆匯8月10日丨普達特科技(00650.HK)發佈公吿,2023年8月10日,公司向客户發出OCTOPUS平台半導體濕法清洗設備(“該等產品”)。該等設備訂單的收入暫未確認。該等客户及其最終實益擁有人為獨立於公司及其關連人士的第三方。
OCTOPUS濕法處理平台配置16個腔體,適用於有大規模量產需求以及追求最大化的單位時間晶圓產出的客户。OCTOPUS平台設備的腔體和化學藥液供應系統採用同垂直面陣列布局,在提供高產能的同時也能保證最佳的化學藥液回收效率,從而也能為客户降低化學品消耗成本。
OCTOPUS平台提供多種晶圓Chuck配置方案,滿足客户晶圓單面清洗、雙面清洗、邊緣清洗和刻蝕等定製化需求。OCTOPUS平台既可以在單一應用上靠多腔體提升產能,也可以在同平台上分組為不同應用配置以滿足研發的各種需求。該等產品為單片晶圓清洗設備,其設計用於矽晶圓清洗,以去除任何黏附顆粒及有機╱無機雜質。
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